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NLS11/12 Nano-displacement Sensor

The universal measurement solution for non-contacting profilometry on technical surfaces with difficult topography. The sensors are ideally suited for sensitive, soft or liquid surfaces. The small footprint simplifies integration into existing systems. Easy operation and extraordinary dynamic range in combination with high measurement speed perfectly matches the requirements of automated measurement tasks. Reliable results even with untrained personnel. Robust, long-lived construction, no moving parts outside the closed compartment. Determination of flatness, altitude or position. Calculation of properties like area, thickness or volume. The NLS12 sensor with the extraordinary standoff simplifies measurements in industrial or inaccessible environments.

Return list
-Main features-
  • Robust, free of maintenance, long-lived.

  • Determination of flatness, altitude or position

  • Calculation of properties like roughness, area or volume

  • Vibration analysis.

-Application area-

Micromechanical engineering, electrical engineering, and optical industry; 

Plastics and paper industry; 

Inspection tasks in the semiconductor and PCB industry; 

Tool industry, mechanical engineering.

   


-Technical specifications-

Model

NLS11/NLS12

Measurement range, mm

1

Resolution,nm

20

Linearity

NLS11:   ≤ 1um

NLS12:   ≤ 2um

Repeatability,nm

≤ 15

Stand-off,mm

NLS11:   4

NLS12:   13.5

Laser source

NLS11:670 nm semiconductor laser diode

NLS12:780 nm semiconductor laser diode

Measurement spot diameter,µm

NLS11:   < 2um

NLS12:   2.0um

Maximum surface tilt º

90±25

Sampling frequency,Hz

16~1K

Data transmission and  Analogue output /SPAN>

RS232,0 to 10 V

Weight,g

NLS11:Sensor approx. 250,Controller approx. 4000;

NLS12:Sensor approx. 2000,Controller approx. 4000.

◆We reserve the right to change the specifications without notice.

-Measuring principle-

Please contact us to get more informations.

-Industry solutions-

Micromechanical engineering, electrical engineering, and optical industry; 

Plastics and paper industry; 

Inspection tasks in the semiconductor and PCB industry; 

Tool industry, mechanical engineering.

   



-Successful case-

Micromechanical engineering, electrical engineering, and optical industry; 

Plastics and paper industry; 

Inspection tasks in the semiconductor and PCB industry; 

Tool industry, mechanical engineering.

   



-Mounting dimensions-


-Related products-
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