
ZED51 Differntial Super High-Precision System
The hybrid for the ZED51 is manufactured to MIL-H-38534. MIL-SPEC components are utilized throughout the electronics module wherever possible. The ZED51 features rugged construction with a mean time between failures of better than 55,000 hours in a tactical environment, 238,000 hours in a space flight environment.
The small package size of the ZED51 (just 2 x 2.12 x 0.75 inches thick) makes this system ideal for applications where space is a limiting factor.
MAIN FEATURES
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Sensor Cables
Sensor cable extension
Most sensors can handle longer cable lengths, although increasing the cable length can and will affect some performance specifications. Shorter than standard cable lengths are also available. Call an apps engineer to discuss your particular requirements.
In-line cable connector splice
Many sensors come with integral sensor cables. Routing this cable in some applications is difficult and something you only want to do once. Including an in-line connector splice in the cable, near the sensor itself, allows for easy sensor replacement should the need arise.
Hermetic in-line connector splice
Some applications pass the sensor through a pressure boundary, most commonly a vacuum chamber wall. We offer an in-line hermetic bulkhead splice for these applications.
Standard published ranges are based on meeting a set of performance specs. Custom calibrations are possible to meet specific application needs. Contact a Kaman applications engineer if a custom calibration is desired.
Target material
Unless otherwise specified, nonferrous systems will be calibrated with an aluminum target, ferrous systems will be calibrated with a 4130 steel target. If your target material is significantly different in conductivity and/or permeability it may be best to calibrate using the same material as your target.
Power supplies
P-3400
SERIES For economy and reliability in a modular power supply, P-3400 Series is unsurpassed. The regulated ±15 Vdc output is compatible with all eddy cuurent measuring systems requiring an external power source, or for any other use requiring a ±15 Vdc output.
The P-3410 features 100mA output with one terminal block, and will power one measuring channel. The P-3450 features 500 mA output with three terminal blocks, and will power up to six measuring channels.

P-3600
SERIES Compatible with the ZED23 and ZED24, these switching power supplies offer clean, reliable, DC voltage output in a small, DIN-rail-mount package.

Calibration fixtures
Calibration of a displacement measuring system verifies that the system output relates to a known physical displacement. Calibration of a ZSY eddy current measuring system requires the ability to position a target at specific locations relative to the range of the sensor.

All ZSY balanced bridge-type measuring systems are calibrated prior to shipment, and ready to use out of the box. Certain requirements can necessitate the need to recalibrate the system:
> Sensor replacement due to physical damage.
> New calibrated range requirements.
> Sensor/bridge change to different model.
> Calibration check/recalibration program.
Proper sizing of a calibration fixture is based on sensor diameter. The calibration fixture has a recommended maximum sensor size for use, based on the physical size of the fixture that sets the radial distance from the sensor to the fixture itself. When a sensor larger than the recommended maximum is calibrated using the fixture, the performance of the system can be affected.
This fixture can be used with virtually any inductive type sensor manufactured in a cylindrical housing, and is provided with a rotating-shaft micrometer head with an aluminum anvil/target. If a different target material is desired, a suitably-sized piece of the target material is attached to the existing anvil.
For larger diameter sensors, ZSY offers hard impact precision ceramic calibration spacers. The set includes seven spacers, 1.5 inches in diameter in the following thicknesses: 0.050 inch, 0.100 inch, 0.200 inch, 0.300 inch, 0.400 inch, 0.500 inch and 1.00 inch. Each spacer may be purchased separately, and a 0.025 inch spacer is also available.
CALIBRATION ACCESSORIES
Micrometer calibration fixture (sensors up to 3U in size), digital micrometer with inch/mm display, 0-1" travel, 0.0001" display resolution. Part number 855578-001.
Individual ceramic calibration spacers
0.025 inch (0.64 mm) Part number 811149-A025
0.05 inch (1.27 mm) Part number 811149-A050
0.10 inch (2.54 mm) Part number 811149-A100
0.20 inch (5.08 mm) Part number 811149-A200
0.30 inch (7.62 mm) Part number 811149-A300
0.40 inch (10.16 mm) Part number 811149-A400
0.50 inch (12.7 mm) Part number 811149-A500
1.00 inch (25.4 mm) Part number 811149-B000
Set of seven spacers (0.05 through 1.00 inch)
Part number 850859-001

Differential measurement:
Two precisely matched sensors are placed on both sides of the platform on which the two sensors form the opposite ends of the balanced bridge circuit, which provides excellent linearity and thermal stability, so the output is accurately recorded The slightest movement of the line. Such as laser reflector focusing platform positioning.
Low temperature applications:
The 1SR9 sensor has a special low temperature application version, which has an internal telescopic joint that can effectively eliminate stress or temperature caused by mechanical degeneration when installing a Belleville gasket with screws. It has been shown to have the most excellent performance in liquid nitrogen at 70 ° K. Several space projects use this sensor in a 4 ° K liquid helium environment.
Vacuum applications:
Sensors and ZED51 electronic devices have been used in the vacuum application of 10-6 Torr.
Ultra-high precision aerospace applications:
MIL-H-38534 has been manufactured. All electronic devices are in line with MIL-SPEC standards. ZED51 in combat environment more than 55,000 hours, space flight environment more than 238,000 hours.
Small size (only 2 x 2.12 x 0.75 inches), can be applied to small space occasions.
Business differential:
ZED52 differential system is a commercial version of ZED51. This system greatly reduces the cost of the differential system, but also to maintain the performance advantages. These differential systems are preferred if the weight, size and energy consumption are not specifically limited.
Relay lens laser positioning (RME):
RME demonstrated that a laser that was launched from Earth to a 450-kilometer orbit satellites could be accurately reflected to a target ground of 3 meters in diameter.
ZED51 is used to accurately locate the 1500px relay lens, the accuracy of 16 times higher than the test target, line of sight stability is 2.3 times higher.
Ultra-high precision laser focusing in semiconductor wafer fabrication:
Laser micro-injection technology is used to develop "direct write" applications and high-throughput template pattern applications in semiconductor wafer fabrication, and is also incorporated into 0.1 micron process products. ZED51 is applied to this technology, precise control of the laser position, complete ultra-high precision position, key size and alignment control.
Other applications: Night vision systems, Precision telescope positioning, Fast steering mirrors, Image stabilization systems

| Parameter | Value |
| Nonlinearity | ±0.1% to ±0.5% FSO; application dependent. |
| Output | ±10 Vdc maximum |
| Long-term stability | (nominal; stabilized at 70°F [21°C] scale factor dependent) 5 x 10-6 inches/month (1.27 x 10-4 mm/month) |
| Thermal sensitivity | at null; application dependent; <5 mV per °F. |
| Frequency response | 22 kHz ±5% @ 3 db |
| RMS input displacement resolution | (if bandwidth limited to 5 kHz): 4x10-9 x √bandwidth in Hz = in. 1x10-7 x √bandwidth in Hz = mm |
| Input voltage | ±15 Vdc @ 55 mA typical |
| Power consumption | <2 watts - system |
| Power dissipation | <0.5 mW per SR9 sensor <1.5 mW per 1SR9 sensor |
| Output characteristics | <5 w @ 5 ma |
| Operating temperature range | |
| Electronics | -4°F to +140°F (-20°C to +60°C) |
| Sensors | 62°F to +220°F (-52°C to +105°C) |
| Cryogenic 1SR9 sensor | +4°K to +220°F (+105°C) |
| Storage temperature range | |
| Electronics | 26°F to +180°F (-32°C to +82°C) |
| Sensors | -62°F to +220°F (-52°C to +105°C) |
| Cryogenic 1SR9 sensor | +4°K to +220°F (+105°C) |
| Weight (with 5-foot cable) | |
| Electronics | 2.5 ounces (70 grams) |
| SR9-001 sensor | 0.61 ounces (17.3 grams) |
| 1SR9 sensor | 0.59 ounces (16.8 grams) |
| SENSOR | Range ±mil/±mm | Null ±mil/±mm | Typical Non-Linearity ± %FR | Maximum Non-Linearity ± %FR | Typical Sensor TempCo ± %FR/°C | Resolution p-p%FR at 1 kHz BW at FR | Resolution p-p%FR at 1 kHz BW at Null |
| SR9 | 10/0.25 | 15/0.38 | 0.15% | 0.30% | 0.02% | 0.02% | 0.00% |
| SR9 | 20/0.51 | 25/0.64 | 0.25% | 0.50% | 0.03% | 0.01% | 0.00% |
| SR9 | 35/0.89 | 40/1.02 | 0.50% | 1.00% | 0.03% | 0.01% | 0.00% |
| 1SR9 | 10/0.25 | 20/0.51 | 0.10% | 0.20% | 0.02% | 0.03% | 0.01% |
| 1SR9 | 20/0.51 | 40/1.02 | 0.15% | 0.30% | 0.02% | 0.02% | 0.01% |
| 1SR9 | 50/1.27 | 60/1.52 | 0.25% | 0.50% | 0.03% | 0.01% | 0.00% |
| 1SR9 | 75/1.91 | 85/2.16 | 0.50% | 1.00% | 0.03% | 0.01% | 0.00% |
| Note: Full range (FR) is considered as twice the ±range value. Temperature coefficient at null<0.005% FR/°C typical. Performance specifications are based on aluminum target. | |||||||
Differential Measurements
Differential measuring systems are a significant advance in precision measurement technology. They provide exceptional resolution, repeatability, and nulling accuracy for detecting the aligned/centered position of a conductive target relative to a pair of noncontacting sensors.
In an eddy current differential system, the two coils in the inductive bridge are housed in two separate sensors. Rather than one active coil and one reference coil, both sensors contain active coils as in figure 2. These two sensors are usually placed on opposite sides of a target or opposite sides of a target pivot point, as in figure 1.
As the target moves closer to one sensor, it moves away from the other, increasing the impedance in one leg of the inductive bridge, and decreasing the other. This push-pull effect amplifies the linear output-per-displacement and eliminates the need for summation amplifiers that add noise and drift. As a result, differential systems provide greater resolution and thermal stability than single-ended systems.


Differential measurement:
Two precisely matched sensors are placed on both sides of the platform on which the two sensors form the opposite ends of the balanced bridge circuit, which provides excellent linearity and thermal stability, so the output is accurately recorded The slightest movement of the line. Such as laser reflector focusing platform positioning.
Low temperature applications:
The 1SR9 sensor has a special low temperature application version, which has an internal telescopic joint that can effectively eliminate stress or temperature caused by mechanical degeneration when installing a Belleville gasket with screws. It has been shown to have the most excellent performance in liquid nitrogen at 70 ° K. Several space projects use this sensor in a 4 ° K liquid helium environment.
Vacuum applications:
Sensors and ZED51 electronic devices have been used in the vacuum application of 10-6 Torr.
Ultra-high precision aerospace applications:
MIL-H-38534 has been manufactured. All electronic devices are in line with MIL-SPEC standards. ZED51 in combat environment more than 55,000 hours, space flight environment more than 238,000 hours.
Small size (only 2 x 2.12 x 0.75 inches), can be applied to small space occasions.
Business differential:
ZED52 differential system is a commercial version of ZED51. This system greatly reduces the cost of the differential system, but also to maintain the performance advantages. These differential systems are preferred if the weight, size and energy consumption are not specifically limited.
Relay lens laser positioning (RME):
RME demonstrated that a laser that was launched from Earth to a 450-kilometer orbit satellites could be accurately reflected to a target ground of 3 meters in diameter.
ZED51 is used to accurately locate the 1500px relay lens, the accuracy of 16 times higher than the test target, line of sight stability is 2.3 times higher.
Ultra-high precision laser focusing in semiconductor wafer fabrication:
Laser micro-injection technology is used to develop "direct write" applications and high-throughput template pattern applications in semiconductor wafer fabrication, and is also incorporated into 0.1 micron process products. ZED51 is applied to this technology, precise control of the laser position, complete ultra-high precision position, key size and alignment control.
Other applications: Night vision systems, Precision telescope positioning, Fast steering mirrors, Image stabilization systems

Relay Mirror Experiment
The Relay Mirror Experiment (RME) demonstrated that a laser beam can be accurately relayed from the earth to an orbiting satellite 450 kilometers away and then back to a 3-meter target on the ground. A free-flying spacecraft functions as the orbiting laser beam relay system. The objective was to validate the stabilization, tracking and pointing technologies at military performance levels through a credible demonstration of a space-based relay mirror system.
ZED51 differential sensors were used to precisely position the 60-centimeter relay mirror on the spacecraft payload to reflect the beams back to the target site. The ZED51 was instrumental in achieving relay laser beam pointing accuracy that was 16 times.
better than the experimental goal and line-of-sight stabilization that was 2.3 times better.

Super Precise Laser Focusing
Laser microcolumn technology is being used to develop direct-write applications in semiconductor wafer manufacturing. Microcolumn architecture uses laser devices with column lengths of several millimeters, and offers high resolution, miniaturization, and new source technology possibilities.
The technology is being used to develop both direct write applications and high-throughput mask patterning applications, and is being incorporated into products around the 0.1 micron generation.
ZED51 sensors are used in this technology to precisely position the laser to allow exceptionally fine placement, critical dimensions, and alignment control.

SR9 Sensor
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1SR9 Sensor
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ZED23 Series Single-channel multi-purpose non-contact displacement sensing system

ZED52 differential eddy current position sensor

ZED97 Flexible, high-resolution position/displacement systems for OEM applications