ZED52 differential eddy current position sensor contains two eddy current probe, with high resolution, high sensitivity, used for the measured material for the aluminum, copper and other conductive materials; with single, dual channel configuration.
F E A T U R E S
> True differential for common mode rejection at an economical price
> High precision eddy current balanced bridge technology
> Capable of subnanometer resolution
> Thermal stability ±.03% FS/°C, at null ±.005% FS/°C
> Small package size: just 7.7 cubic inches
> High sensitivity: up to 10V/mil (39mV/µm)
> Extremely linear, to 0.1% full range
> Single and dual channel configurations
MAIN FEATURES
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Sensor Cables
Sensor cable extension
Most sensors can handle longer cable lengths, although increasing the cable length can and will affect some performance specifications. Shorter than standard cable lengths are also available. Call an apps engineer to discuss your particular requirements.
In-line cable connector splice
Many sensors come with integral sensor cables. Routing this cable in some applications is difficult and something you only want to do once. Including an in-line connector splice in the cable, near the sensor itself, allows for easy sensor replacement should the need arise.
Hermetic in-line connector splice
Some applications pass the sensor through a pressure boundary, most commonly a vacuum chamber wall. We offer an in-line hermetic bulkhead splice for these applications.
Standard published ranges are based on meeting a set of performance specs. Custom calibrations are possible to meet specific application needs. Contact an applications engineer if a custom calibration is desired.
Target material
Unless otherwise specified, nonferrous systems will be calibrated with an aluminum target, ferrous systems will be calibrated with a 4130 steel target. If your target material is significantly different in conductivity and/or permeability it may be best to calibrate using the same material as your target.
Power supplies
P-3400
SERIES For economy and reliability in a modular power supply, P-3400 Series is unsurpassed. The regulated ±15 Vdc output is compatible with all eddy cuurent measuring systems requiring an external power source, or for any other use requiring a ±15 Vdc output.
The P-3410 features 100mA output with one terminal block, and will power one measuring channel. The P-3450 features 500 mA output with three terminal blocks, and will power up to six measuring channels.
P-3600
SERIES Compatible with the ZED23 and ZED24, these switching power supplies offer clean, reliable, DC voltage output in a small, DIN-rail-mount package.
Calibration fixtures
Calibration of a displacement measuring system verifies that the system output relates to a known physical displacement. Calibration of a ZSY eddy current measuring system requires the ability to position a target at specific locations relative to the range of the sensor.
All ZSY balanced bridge-type measuring systems are calibrated prior to shipment, and ready to use out of the box. Certain requirements can necessitate the need to recalibrate the system:
> Sensor replacement due to physical damage.
> New calibrated range requirements.
> Sensor/bridge change to different model.
> Calibration check/recalibration program.
Proper sizing of a calibration fixture is based on sensor diameter. The calibration fixture has a recommended maximum sensor size for use, based on the physical size of the fixture that sets the radial distance from the sensor to the fixture itself. When a sensor larger than the recommended maximum is calibrated using the fixture, the performance of the system can be affected.
This fixture can be used with virtually any inductive type sensor manufactured in a cylindrical housing, and is provided with a rotating-shaft micrometer head with an aluminum anvil/target. If a different target material is desired, a suitably-sized piece of the target material is attached to the existing anvil.
For larger diameter sensors, ZSY offers hard impact precision ceramic calibration spacers. The set includes seven spacers, 1.5 inches in diameter in the following thicknesses: 0.050 inch, 0.100 inch, 0.200 inch, 0.300 inch, 0.400 inch, 0.500 inch and 1.00 inch. Each spacer may be purchased separately, and a 0.025 inch spacer is also available.
CALIBRATION ACCESSORIES
Micrometer calibration fixture (sensors up to 3U in size), digital micrometer with inch/mm display, 0-1" travel, 0.0001" display resolution. Part number 855578-001.
Individual ceramic calibration spacers
0.025 inch (0.64 mm) Part number 811149-A025
0.05 inch (1.27 mm) Part number 811149-A050
0.10 inch (2.54 mm) Part number 811149-A100
0.20 inch (5.08 mm) Part number 811149-A200
0.30 inch (7.62 mm) Part number 811149-A300
0.40 inch (10.16 mm) Part number 811149-A400
0.50 inch (12.7 mm) Part number 811149-A500
1.00 inch (25.4 mm) Part number 811149-B000
Set of seven spacers (0.05 through 1.00 inch)
Part number 850859-001
Applications for differential bridge systems include:
Steering mirror position
Pointing and tracking in night vision and laser systems
Control systems for active vibration monitoring and control systems
Photolithography stage positioning and control
Servo control position feed back
Stage positioning
Angular displacement indication
X-Y orbit position feed back
Stylus position
| Parameter | Value |
| Target material | Aluminum |
| Output voltage | ±10 volts typical |
| Power dissipation | At SR9 sensor head<0.5 mW/sensor typical |
| At 1SR9 sensor head<2 mwsensor typical | |
| Electronics<1.35 Watts | |
| Frequency response | 0-20 kHz |
| Input voltage | ±15 volts |
| Output impedance | <1 ohm |
| Weight | Electronics 6 oz. |
| W/4 15N sensors 8 oz. | |
| Operating temperature range | Electronics +32°F to +140°F (0°C to +60°C) |
| Sensors -62°F to +220°F (-52°C to +105°C) | |
| Storage temperature range | Electronics -26°F to +180°F (-32°C to +82°C) |
| Sensors -62°F to +220°F (-52°C to +105°C) |
| SENSOR | Range ±mil/±mm | Null ±mil/±mm | Typical Non-Linearity ± %FR | Maximum Non-Linearity ± %FR | Typical Sensor TempCo ± %FR/°C | Resolution p-p%FR at 1 kHz BW at FR | Resolution p-p%FR at 1 kHz BW at Null |
| SR9 | 10/0.25 | 15/0.38 | 0.15% | 0.30% | 0.02% | 0.02% | 0.00% |
| SR9 | 20/0.51 | 25/0.64 | 0.25% | 0.50% | 0.03% | 0.01% | 0.00% |
| SR9 | 35/0.89 | 40/1.02 | 0.50% | 1.00% | 0.03% | 0.01% | 0.00% |
| 1SR9 | 10/0.25 | 20/0.51 | 0.10% | 0.20% | 0.02% | 0.03% | 0.01% |
| 1SR9 | 20/0.51 | 40/1.02 | 0.15% | 0.30% | 0.02% | 0.02% | 0.01% |
| 1SR9 | 50/1.27 | 60/1.52 | 0.25% | 0.50% | 0.03% | 0.01% | 0.00% |
| 1SR9 | 75/1.91 | 85/2.16 | 0.50% | 1.00% | 0.03% | 0.01% | 0.00% |
| Note: Full range (FR) is considered as twice the ±range value. Temperature coefficient at null<0.005% FR/°C typical. Performance specifications are based on aluminum target. | |||||||
Differential Measurements
Differential measuring systems are a significant advance in precision measurement technology. They provide exceptional resolution, repeatability, and nulling accuracy for detecting the aligned/centered position of a conductive target relative to a pair of noncontacting sensors.
In an eddy current differential system, the two coils in the inductive bridge are housed in two separate sensors. Rather than one active coil and one reference coil, both sensors contain active coils as in figure 2. These two sensors are usually placed on opposite sides of a target or opposite sides of a target pivot point, as in figure 1.
As the target moves closer to one sensor, it moves away from the other, increasing the impedance in one leg of the inductive bridge, and decreasing the other. This push-pull effect amplifies the linear output-per-displacement and eliminates the need for summation amplifiers that add noise and drift. As a result, differential systems provide greater resolution and thermal stability than single-ended systems.
Applications for differential bridge systems include:
Steering mirror position
Pointing and tracking in night vision and laser systems
Control systems for active vibration monitoring and control systems
Photolithography stage positioning and control
Servo control position feed back
Stage positioning
Angular displacement indication
X-Y orbit position feed back
Stylus position
Applications for differential bridge systems include:
Steering mirror position
Pointing and tracking in night vision and laser systems
Control systems for active vibration monitoring and control systems
Photolithography stage positioning and control
Servo control position feed back
Stage positioning
Angular displacement indication
X-Y orbit position feed back
Stylus position
Electronics and Sensors
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