The ZED97 is a custom OEM product that can be tested with non-magnetized and ferromagnetic materials with 1, 2 or 3 channel configurable eddy current probes. With Amy resolution, CE and ROHS standards, small size, and can be equipped with 13 kinds of eddy current probe. At the same time material, linear, resolution, bandwidth, a variety of performance can be self-optimization.
Flexible and High-Resolution
The ZED97 meets and exceeds the requirements of today’s high precision positioning and displacement sensing applications. The system is ideally suited for applications ranging from photolithography stage positioning in semiconductor capital equipment, to position feedback in precision grinding of bearing races.
Based on proprietary architecture, the configured ZED97 is very cost effective, even in low-volume OEM applications. And when the volume is one, it provides superior performance for half the price of competitive technologies in lab and analytical applications.
MAIN FEATURES
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Sensor Cables
Sensor cable extension
Most sensors can handle longer cable lengths, although increasing the cable length can and will affect some performance specifications. Shorter than standard cable lengths are also available. Call an apps engineer to discuss your particular requirements.
In-line cable connector splice
Many sensors come with integral sensor cables. Routing this cable in some applications is difficult and something you only want to do once. Including an in-line connector splice in the cable, near the sensor itself, allows for easy sensor replacement should the need arise.
Hermetic in-line connector splice
Some applications pass the sensor through a pressure boundary, most commonly a vacuum chamber wall. We offer an in-line hermetic bulkhead splice for these applications.
Standard published ranges are based on meeting a set of performance specs. Custom calibrations are possible to meet specific application needs. Contact a Kaman applications engineer if a custom calibration is desired.
Target material
Unless otherwise specified, nonferrous systems will be calibrated with an aluminum target, ferrous systems will be calibrated with a 4130 steel target. If your target material is significantly different in conductivity and/or permeability it may be best to calibrate using the same material as your target.
Power supplies
P-3400
SERIES For economy and reliability in a modular power supply, P-3400 Series is unsurpassed. The regulated ±15 Vdc output is compatible with all eddy cuurent measuring systems requiring an external power source, or for any other use requiring a ±15 Vdc output.
The P-3410 features 100mA output with one terminal block, and will power one measuring channel. The P-3450 features 500 mA output with three terminal blocks, and will power up to six measuring channels.
P-3600
SERIES Compatible with the ZED23 and ZED24, these switching power supplies offer clean, reliable, DC voltage output in a small, DIN-rail-mount package.
Calibration fixtures
Calibration of a displacement measuring system verifies that the system output relates to a known physical displacement. Calibration of a ZSY eddy current measuring system requires the ability to position a target at specific locations relative to the range of the sensor.
All ZSY balanced bridge-type measuring systems are calibrated prior to shipment, and ready to use out of the box. Certain requirements can necessitate the need to recalibrate the system:
> Sensor replacement due to physical damage.
> New calibrated range requirements.
> Sensor/bridge change to different model.
> Calibration check/recalibration program.
Proper sizing of a calibration fixture is based on sensor diameter. The calibration fixture has a recommended maximum sensor size for use, based on the physical size of the fixture that sets the radial distance from the sensor to the fixture itself. When a sensor larger than the recommended maximum is calibrated using the fixture, the performance of the system can be affected.
This fixture can be used with virtually any inductive type sensor manufactured in a cylindrical housing, and is provided with a rotating-shaft micrometer head with an aluminum anvil/target. If a different target material is desired, a suitably-sized piece of the target material is attached to the existing anvil.
For larger diameter sensors, ZSY offers hard impact precision ceramic calibration spacers. The set includes seven spacers, 1.5 inches in diameter in the following thicknesses: 0.050 inch, 0.100 inch, 0.200 inch, 0.300 inch, 0.400 inch, 0.500 inch and 1.00 inch. Each spacer may be purchased separately, and a 0.025 inch spacer is also available.
CALIBRATION ACCESSORIES
Micrometer calibration fixture (sensors up to 3U in size), digital micrometer with inch/mm display, 0-1" travel, 0.0001" display resolution. Part number 855578-001.
Individual ceramic calibration spacers
0.025 inch (0.64 mm) Part number 811149-A025
0.05 inch (1.27 mm) Part number 811149-A050
0.10 inch (2.54 mm) Part number 811149-A100
0.20 inch (5.08 mm) Part number 811149-A200
0.30 inch (7.62 mm) Part number 811149-A300
0.40 inch (10.16 mm) Part number 811149-A400
0.50 inch (12.7 mm) Part number 811149-A500
1.00 inch (25.4 mm) Part number 811149-B000
Set of seven spacers (0.05 through 1.00 inch)
Part number 850859-001
ZED97 system uses proven inductive(eddy current) technology to provide extremely high-resolution noncontact position/displacement feedback of virtually any electrically conductive target. It is ideal for applications requiring highresolution position feedback for control and has been proven in applications including optics positioning in photolithography equipment, XYZ stage positioning in atomic force microscopy, and spindle position in precision grinding of bearing races.
Such as ptical platform position measurement, the grinding of semiconductor and optical devices, semiconductor template alignment system, evaporation system, electron microscope, the orientation of the vertical axis vertical axis, atomic microscope, magnetic levitation axis control, precise localization of components of grinding, the lens control, material shrinkage test and measurement, the mechanical structure deformation detection and testing.
| Parameter | Value |
| Electronics temperature | Operating range 0° to 70°C (32° to 158°F) Storage range -40° to +85°C (-40° to 185°F) Compensation range 15° to 55°C (59° to 131°F) |
| Analog output | Continuous load current<20 ma Short circuit/overload protection Yes |
| Input | Supply voltage required 15 to 30 Vdc Current limit (no load current input)<50 ma Reverse polarity protection Yes Short circuit protection Yes |
| SENSOR | STANDARD MEASURING RANGE | TARGET MATERIAL | ||
| inch | mm | non-fer† | ferrous | |
| SR5** | 0.02 | 0.5 | • | |
| SR9** | 0.035 | 0.9 | • | |
| 1SRA** | 0.04 | 1 | • | |
| 1SR3A** | 0.05 | 1.3 | • | |
| 1SR9** | 0.075 | 1.9 | • | |
| 4MT* | 0.1 | 2.5 | • | |
| 3SR** | 0.12 | 3 | • | |
| 5MT* | 0.16 | 4 | • | • |
| 8MT* | 0.2 | 5 | • | • |
| 6SR** | 0.24 | 6 | • | • |
| 12MT* | 0.32 | 8.1 | • | • |
| 20MT* | 0.5 | 12.7 | • | • |
| 25MT* | 0.6 | 15 | • | • |
| Reference Sensors Data Sheet for dimensional information. * Operating temperature cryogenic to +400°F (+200°C), sensor dependent ** Operating temperature -67° to +220°F (-55° to +105°C) † Non-ferrous target material is recommended for best performance. Ferrous targets are not recommended for small sensors. Contact ZSY for applications assistance if considering ferrous target material. | ||||
ZED97 is a non-contact, linear, analog displacement measuring system. The system operates on a traditional inductive bridge circuit. This easy-to-use, versatile system can be utilized for precision static and dynamic measurements of conductive targets.
The sensor coil makes up one or two legs (depending on single or dual coil sensor) of a balanced bridge network. As the target changes position within the sensor field, the bridge network senses impedance changes in the sensor coil. These changes are converted to an analog voltage or current signal directly proportional to target displacement.
ZED97 system uses proven inductive(eddy current) technology to provide extremely high-resolution noncontact position/displacement feedback of virtually any electrically conductive target. It is ideal for applications requiring highresolution position feedback for control and has been proven in applications including optics positioning in photolithography equipment, XYZ stage positioning in atomic force microscopy, and spindle position in precision grinding of bearing races.
Such as ptical platform position measurement, the grinding of semiconductor and optical devices, semiconductor template alignment system, evaporation system, electron microscope, the orientation of the vertical axis vertical axis, atomic microscope, magnetic levitation axis control, precise localization of components of grinding, the lens control, material shrinkage test and measurement, the mechanical structure deformation detection and testing.
ZED97 system uses proven inductive(eddy current) technology to provide extremely high-resolution noncontact position/displacement feedback of virtually any electrically conductive target. It is ideal for applications requiring highresolution position feedback for control and has been proven in applications including optics positioning in photolithography equipment, XYZ stage positioning in atomic force microscopy, and spindle position in precision grinding of bearing races.
Such as ptical platform position measurement, the grinding of semiconductor and optical devices, semiconductor template alignment system, evaporation system, electron microscope, the orientation of the vertical axis vertical axis, atomic microscope, magnetic levitation axis control, precise localization of components of grinding, the lens control, material shrinkage test and measurement, the mechanical structure deformation detection and testing.
Electronics
ZED23 Series Single-channel multi-purpose non-contact displacement sensing system
ZED24 Non-contact high-precision proximity measuring system
