The ZED53 Series Differential Eddy Current Position Sensor is a differential eddy current position sensor with the best resolution, repeatability and stability. The power consumption of 2 detection channels is only 0.4W. The unique installation zero adjustment method greatly simplifies the installation process, and at the same time can achieve um-level installation accuracy. Excellent choice for detection.
ZED53 system consists of two parts: measuring probe and controller. The measuring probe extracts the distance information as the impedance information of the coil, and the phase demodulation circuit in the processing circuit converts the impedance information into a voltage signal related to the displacement, which is output after linear correction by the digital module.
There are 4 probe ports and analog input/output ports on the ZED53 customizable differential eddy current position sensor controller. 4 probes form 2 differential measurement channels: CHA and CHB. The analog input/output interface includes power supply interface and 2-channel analog output port. Each ZED53 sensor is equipped with a reference probe that assists in precise positioning during probe installation.
The range, shape, material, and lead length of the probe can be customized.
MAIN FEATURES
|
|
the size of the target board should be larger than 3 times the size of the probe, and the existence of other conductive materials other than the target in the space 3 times the diameter of the probe will cause linear deterioration.
If the measured target material does not use the specified material, the nonlinearity, temperature stability and the parameter table will be different, and the user can use it normally after re-calibration.
the thickness of the target conductor is at least 4 times the skin depth, and the target thickness for aluminum alloy materials is greater than 0.4mm. If the two measuring probes measure the front and back of the target at the same position, it is recommended that the target thickness be greater than 1mm.
When installing the probe, follow the zero adjustment steps, and adjust the voltage to Vref and 0V as accurately as possible in the first and second steps. If the zero position deviation is large, it may cause the deterioration of nonlinearity and temperature stability.
In order to ensure that the sensor reaches the performance index of the factory calibration, the number of the four measuring probes is connected with the channel number correspondingly, and cannot be installed in random pairs.
The fixed structure of the measuring probe should be as stable and compact as possible. The complex transmission chain and the frame material with high thermal expansion coefficient will deteriorate the temperature stability of the measurement.
The target plate is not parallel to the surface of the measuring probe during the movement process, resulting in the deterioration of the linearity, but it has little effect on the noise and temperature drift coefficient, and the user can use it normally after re-calibration.
The coil is encapsulated with PEEK material
The electromagnetic field is widely distributed
Large measuring range requires larger measured surface size
Poor immunity to adjacent conductors
PEEK package flush with metal case
The electromagnetic field distribution range is small, and the measurement range is small
Strong immunity to adjacent conductors
In order to maintain the ZED53 sensor with the best overall performance (especially temperature stability), the sensor does not provide potentiometers for adjusting sensitivity and zero position. If the target material needs to be replaced, the target size is too small, or there are other metals around the measuring probe, and other special circumstances require re-calibration, the corresponding relationship between the displacement and the output voltage can be recorded, and the digital calibration method can be used for optimization. In general, digital correction is better than analog correction to maintain the overall performance of the sensor.
(1) Threaded probe
Thread fixing is a common fixing method. There are the following two fixing methods. The probe needs to extend a distance from the metal nut or the fixing plate. For the specific value, see the probe dimension drawing.
Due to the existence of the thread gap, there may be a certain error in the installation angle of the probe. Selecting a nut that is in close contact with the probe can reduce the error to a certain extent.
(2) Polished rod probe
The polished rod probe can be fixed with a circumferential lock, which can provide a stable fixing effect. The probe needs to extend out of the metal fixture for a certain distance. For the specific value, see the probe dimension drawing.
Applications for differential bridge systems include:
Steering mirror position
Pointing and tracking in night vision and laser systems
Control systems for active vibration monitoring and control systems
Photolithography stage positioning and control
Servo control position feed back
Stage positioning
Angular displacement indication
X-Y orbit position feed back
Stylus position
| Model | ZED53-0.2 | ZED53-0.5 | ZED53-0.8 | |
| Range | ±0.2 mm | ±0.5 mm | ±0.8 mm | |
| Resolution | @NULL | <0.003 %FSO | <0.002 %FSO | <0.002 %FSO |
| @FSO | <0.004 %FSO | <0.003 %FSO | <0.003 %FSO | |
| Linearity | < ±0.3 %FSO1) | < ±0.5 %FSO | < ±1 %FSO | |
| Analog output bandwidth (-3dB) | 10 kHz | |||
| Temperature Stability | @NULL | <±0.005 %FSO/°C | <±0.004 %FSO/°C | <±0.003 %FSO/°C |
| @FSO | <±0.02 %FSO/°C | <±0.03 %FSO/°C | <±0.03 %FSO/°C | |
| Minimum clearance | 0.1 mm | |||
| Output voltage | -5V ...+5V | |||
| Power | 12...24 V, 0.4 W | |||
| Target material 2) | Ferromagnetic and non-ferromagnetic materials | |||
| Operating temperature | controller | -40...+60 ℃ | ||
| Probe | -55...+100 ℃ | |||
| 1) FSO：Full Scall Output 2) Factory calibration material: 6061 aluminum and Q235 steel | ||||
Differential Measurements
Differential measuring systems are a significant advance in precision measurement technology. They provide exceptional resolution, repeatability, and nulling accuracy for detecting the aligned/centered position of a conductive target relative to a pair of noncontacting sensors.
In an eddy current differential system, the two coils in the inductive bridge are housed in two separate sensors. Rather than one active coil and one reference coil, both sensors contain active coils as in figure 2. These two sensors are usually placed on opposite sides of a target or opposite sides of a target pivot point, as in figure 1.
As the target moves closer to one sensor, it moves away from the other, increasing the impedance in one leg of the inductive bridge, and decreasing the other. This push-pull effect amplifies the linear output-per-displacement and eliminates the need for summation amplifiers that add noise and drift. As a result, differential systems provide greater resolution and thermal stability than single-ended systems.
Applications for differential bridge systems include:
Steering mirror position
Pointing and tracking in night vision and laser systems
Control systems for active vibration monitoring and control systems
Photolithography stage positioning and control
Servo control position feed back
Stage positioning
Angular displacement indication
X-Y orbit position feed back
Stylus position
Applications for differential bridge systems include:
Steering mirror position
Pointing and tracking in night vision and laser systems
Control systems for active vibration monitoring and control systems
Photolithography stage positioning and control
Servo control position feed back
Stage positioning
Angular displacement indication
X-Y orbit position feed back
Stylus position
Electronics
Reference probe
Standard probe
ZED23 Series Single-channel multi-purpose non-contact displacement sensing system
ZED24 Non-contact high-precision proximity measuring system
Sensor huge market demand in 2021 will reach one hundred billion market
